Control system design and integration onto a single computer touchscreen. Various projects included:
Vacuum system interlocks
Automated pumpdown with trending. Valve sequencing
Pump start/stop: dry, rotary vane, turbo, cryo with regen function, diffusion
Load lock gate valves. Butterfly throttling valves.
Chillers, substrate heaters, bake-out.
Mass Flow controllers with automated recipes for multiple layer depositions
Electron beam with crystal controlled stop on target layer thickness.
Ceramic boats with automated wire feed
ECR/ICP-CVD high voltage control
Custom Residual Gas Analyser (RGA) displays
CC, TC, Ion Gauging integration with live trending
TXR Custom Thermal infrared transfer radiometer interface
Custom interface to J. A. Woollam Co. Spectroscopic Ellipsometers
Automated sequence, trend logging and safety interlocks for unattended operation
Bar code reading and printing for production tracking
RM Systems Integrators 