Automated Semiconductor Wafer Fabrication

 


Implementation

The original system consisted of a AB SLC 5/02 and Panelview 550 providing supervisory control of an ultrahigh vacuum system for fabrication of germanium and aluminum wafers. The deposition controller is a Leybold IC5 and is connected to a PC running ViewDAC software.  This equipment is housed in a semiconductor fab clean room.

New version of this control system uses an Advantech flat panel touchscreen with an application in Visual Basic.  Trend graphs display process pumpdown and deposition.

RM Systems Integrators provides control system design and programming for this client with systems in Canada, China and India.


Benefits

  • Entry of batch numbers and selection of product for controller download
  • Visual Alarms for pumpdown and process errors
  • Automated data collection of process during pumpdown and deposition
  • Disk maintenance free with automatic wraparound file system

Technical Details

  • Visual Basic 6.  Enhanced performance with custom classes providing “change of state” refreshing.
  • MS Access 2000 database with Ethernet connectivity
  • IOComp Instrumentation Pack – ActiveX
  • Custom connection software from PC to Leybold IC5
  • Allen Bradley SLC 5/03, Panelview 550, Advantech flat panel PC

Client Link:  http://www.ultrahivac.com/

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