The original system consisted of a AB SLC 5/02 and Panelview 550 providing supervisory control of an ultrahigh vacuum system for fabrication of germanium and aluminum wafers. The deposition controller is a Leybold IC5 and is connected to a PC running ViewDAC software. This equipment is housed in a semiconductor fab clean room.
New version of this control system uses an Advantech flat panel touchscreen with an application in Visual Basic. Trend graphs display process pumpdown and deposition.
RM Systems Integrators provides control system design and programming for this client with systems in Canada, China and India.
Client Link: http://www.ultrahivac.com/