The original system consisted of a AB SLC 5/02 and Panelview 550 providing supervisory control of an ultrahigh vacuum system for fabrication of germanium and aluminum wafers. The deposition controller is a Leybold IC5. This equipment is housed in a semiconductor fab clean room.
New version of this control system uses an Advantech flat panel touchscreen with an application in Visual Basic. PLC is AB MicroLogix 850 and a Kinetix Servo drive for motion. Trend graphs display process pumpdown and deposition. Indexer provides manual or automatic material selection for mulitple layers.
RM Systems Integrators provides control system design and programming for this client with systems in Edmonton, Moncton, Ottawa, China and India.
Client Link: http://www.ultrahivac.com/